JPH042020U - - Google Patents
Info
- Publication number
- JPH042020U JPH042020U JP4259290U JP4259290U JPH042020U JP H042020 U JPH042020 U JP H042020U JP 4259290 U JP4259290 U JP 4259290U JP 4259290 U JP4259290 U JP 4259290U JP H042020 U JPH042020 U JP H042020U
- Authority
- JP
- Japan
- Prior art keywords
- developer
- developing device
- semiconductor wafer
- resist film
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259290U JPH042020U (en]) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4259290U JPH042020U (en]) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042020U true JPH042020U (en]) | 1992-01-09 |
Family
ID=31554269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4259290U Pending JPH042020U (en]) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042020U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119965U (en]) * | 1975-03-26 | 1976-09-29 |
-
1990
- 1990-04-20 JP JP4259290U patent/JPH042020U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119965U (en]) * | 1975-03-26 | 1976-09-29 |